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3M™ Trizact™ Pad Conditioner

  • 3M ID B5005049057

Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond

Accurately controlled microreplicated structures

Consistent performance disk-to-disk and the metal-free cutting surface

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Details

Highlights
  • Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
  • Accurately controlled microreplicated structures
  • Consistent performance disk-to-disk and the metal-free cutting surface
  • Ideal for advanced node processes sensitive to metallic contamination

Bringing together 3M’s know-how in abrasives, ceramics and microreplication, the 3M™ Trizact™ Pad Conditioner is an innovative pad conditioner for Chemical Mechanical Polishing (CMP) for advanced node semiconductor manufacturing.

Specifications

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