3M™ Trizact™ Pad Conditioner

3M ID B5005049057

Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond

Accurately controlled microreplicated structures

Consistent performance disk-to-disk and the metal-free cutting surface

Details

Highlights

Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
Accurately controlled microreplicated structures
Consistent performance disk-to-disk and the metal-free cutting surface
Ideal for advanced node processes sensitive to metallic contamination

Bringing together 3M’s know-how in abrasives, ceramics and microreplication, the 3M™ Trizact™ Pad Conditioner is an innovative pad conditioner for Chemical Mechanical Polishing (CMP) for advanced node semiconductor manufacturing.

Specifications

Details

Applications	Advanced Node (Memory & Logic), Wafer Manufacturing, CMP

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3M™ Trizact™ Pad Conditioner

Details

Highlights

Specifications

Details

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